| 摘要 |
<p>A method is provided for manufacturing, the method including processing a workpiece (100) in a processing step (105), measuring (110) a critical dimension of features (205) formed on the workpiece using a test structure (200) formed on the workpiece (100), the test structure (200) including a plurality of the features (205), and forming an output signal (125) corresponding to the critical dimension measurements (120). The method also includes feeding back a control signal (135, 155) based on the output signal (125) to adjust the processing performed in the processing step (105) if the output signal (125) corresponding to the critical dimension measurements (120) indicates a predetermined tolerance value has been exceeded (130, 150).</p> |
