PHOTOINDUCED ACID GENERATOR AND RADIATION-SENSITIVE COMPOSITION CONTAINING SAME

摘要

PROBLEM TO BE SOLVED: To provide a radiation-sensitive composition excellent in storage stability of sensitivity by specifying the ratio of the difference in electrical conductivity between the extraction water layer of a solution prepared by dissolving a photoinduced acid generator generating an acid when irradiated with a radiation in an organic solvent and the extraction water layer of the solvent to the concentration of the solution to a certain value or lower. SOLUTION: This radiation-sensitive composition comprises 100 pts.wt. coating-film-forming resin which becomes alkali-soluble in the presence of an acid, such as polyvinylphenol, 0.1-20 pts.wt. photoinduced acid generator which generates an acid when irradiated with a radiation and a basic compound such as an amine in an amount of 0.1-50 mol% or an amide in an amount of 0.1-500 mol% based on the photoinduced acid generator. An example of the acid generator is a bissulfonyldiazomethane derivative. The ratio of the difference (κ1-κ2)=κ between the electrial conductivity κ1 (μs/cm) of a water layer formed by extracting a solution prepared by dissolving the photoinduced acid generator in an organic solvent with 0.7 volume times as much water and the electrical conductivity κ2 of a water layer formed by extracting the organic solvent containing no photoinduced acid generator with 0.7 volume times as much water to the concentration X (mmol/l) of the solution satisfies the relation represented by the formula: κ/X<=0.18.