| 摘要 |
PROBLEM TO BE SOLVED: To shorten a drying time by rotating a material to be cleaned under a reduced pressure, and drying the material. SOLUTION: A supply pump 6 is stopped, thereby stopping supplying of a cleaning liquid, and the liquid supplied to a cleaning tank 2 is simultaneously returned to a cleaning liquid tank. A rotary shaft 21 is rotated to rapidly rotate a cleaning fixture. The fixture is rotated for a predetermined time to sufficiently drain the fixture, and the drained liquid is returned from a discharge tube such as a central discharge tube 12 or the like to the cleaning tank. Thus, in a state in which the liquid stored in the tank 2 is eliminated, a necessary valve at a piping system for communicating with the tank 2 through the cleaning liquid tank is closed to shut off communication of the tank 2 with the cleaning liquid tank, a vacuum pump 16 is operated to set in the tank 2 to a pressure reduced state. The fixture may be rapidly rotated at it is from an initial time to dry the material held at the fixture. The fixture is rapidly rotated in the reduced pressure state (e.g. 1,000 r.p.m.), thereby conducting drying of the material.
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