发明名称 WIDTH SETTING DEVICE FOR ENERGY SELECTION SLIT
摘要 PROBLEM TO BE SOLVED: To enhance operating efficiency by facilitating the setting of a slit width of an energy selection slit and automatically computing a converted value of the slit width to directly display it. SOLUTION: When an operator operates an operation means 2 to set a slit width W with a measure of length, a CPU 7 controls the drive of an automatic slit-width setting means 3, based on an operation signal of setting the slit width w (μm). The automatic slit-width setting means 3 automatically sets an energy selection slit to have the slit width W. The CPU 7 computes a converted energy value dE (eV) on the basis of the slit width W and outputs a display signal of the slit width w and that of the width dE (eV)s in terms of energy to a display means 4. The display means 4 displays the slit width w and the width dE (eV) in terms of energy. Thus, the slit width W set with a measure of length is displayed directly as the width dE (eV) in terms of energy.
申请公布号 JP2001076666(A) 申请公布日期 2001.03.23
申请号 JP19990247077 申请日期 1999.09.01
申请人 JEOL LTD 发明人 KANAYAMA TOSHIKATSU
分类号 H01J37/244;H01J37/05;H01J49/44;(IPC1-7):H01J49/44 主分类号 H01J37/244
代理机构 代理人
主权项
地址