发明名称 BUMP BONDING METHOD AND THE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a bump bonding device which can be operated in a high rate by intensively and continuously generating spark surely between a metallic wire and a torch. SOLUTION: A bump bonding device is provided with a capillary, which passes a gold wire, a torch 4 which forms a gold ball at the lower edge of the gold wire, by generating spark between the lower edge and a torch holder 1 which holds the torch 4. The bump bonding device is provided with an insulating part 1A, which directly connects a high voltage cable 17a to a spark power source with the torch 4, directly supplies a voltage to the torch 4, and insulates the torch 4 from another metallic part.
申请公布号 JP2001077146(A) 申请公布日期 2001.03.23
申请号 JP19990253105 申请日期 1999.09.07
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 SASAOKA TATSUO;YAMAMOTO AKIHIRO;YONEZAWA TAKAHIRO;SATO SHOJI;TOKUNAGA TETSUYA
分类号 H01L21/60 主分类号 H01L21/60
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