| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged-particle beam apparatus unerringly displaying the figure of a sample bolder mounted on a sample stage. SOLUTION: Each sample holder has a holder terminal fixed thereto for showing the kind of the holder. When a sample holder is attached to a sample- holder mount 11, the holder terminal of the sample holder is connected to an electrical contact connector 12. A holder determining means 19 of a holder information processing means 18 determines the kind of the sample holder attached to the sample stage, based on a signal from the electrical contact connector 12. When the kind of the sample holder has been determined, the holder information processing means 18 reads holder shape data corresponding to the determined sample holder from a holder shape data storing means 20 and displays the shape of the holder on a screen of a display processing means 24.
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