| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an ultraviolet photoelectron spectroscopic apparatus by which the energy of photoelectrons is measured precisely by properly avoiding the Doppler effect due to the vibration on the surface of a sample generated when ultraviolet rays are radiated. SOLUTION: In this ultraviolet photoelectron spectroscopic apparatus 1, ultraviolet rays which are emitted from an ultraviolet light source 2 are passed through a deflector 3 and a condensing optical system 4 so as to be shone at a sample 13 inside an ultrahigh vacuum container 5, photoelectrons which are emitted from a first atomic layer and a second atomic layer as the outermost-side surface of the sample 13 are introduced into an energy analyzer 7, the energy of the photoelectrons is dispersed so as to be detected by a photoelectron detector 8. A light-source control part 11 controls the pulse interval of the ultraviolet rays emitted by the ultraviolet light source 2 on the basis of the information on the pulse interval from a computer 10 for system control. The pulse interval is a time interval which exceeds the relaxation time of a vibration which is generated in the first atomic layer and the second atomic layer as the outermost-side surface of the sample 13 when the ultraviolet rays are irradiated. Consequently, it is possible to prevent the photoelectrons from being subjected to the Doppler effect due to the vibration on the outermost-side surface of the sample 13, and it is possible to enhance the measuring accuracy of the ultraviolet photoelectron spectroscopic apparatus.</p> |
