摘要 |
<p>PROBLEM TO BE SOLVED: To remarkably improve the reliability of a thin film solar battery module by interposing an insulating sheet buried in a filler between a back electrode layer and a wire buried in a filler of the same material, the wire extending from bus regions. SOLUTION: Using a blue plate glass as a transparent insulating substrate 1, a fluorine-doped SnO2 layer is formed as a transparent conductive layer 16. Grooves 18 are formed in this transparent electrode 16 using the second harmonic of a YGA laser. A semiconductor layer 19 is formed in and over the grooves 18. Then, grooves 21 are formed for connection with adjacent photovoltaic elements, and a back electrode layer 22 is further formed on the layer 19. Further, grooves 24 are formed to obtain electrodes 23, whereby unit elements 28 are series-connected. Bus regions 3 and 3' are formed, and a plurality of grooves 25 are formed therein. Bumps 26 are formed of a Cerasolza ceramic solder to connect solder-plated copper foil 4 thereto. A peripheral region 27 of the substrate 1 is polished to obtain a region where no layers are present. Therefore, by laminating the resulting body using a double-walled vacuum vessel laminator, the reliability of the thin film solar battery module can be improved.</p> |