发明名称 APPARATUS AND METHODS FOR PERFORMING SELF-CLEARING OPTICAL MEASUREMENTS
摘要 <p>Disclosed is a self-clearing objective (100) for directing a beam towards a sample and clearing away debris from an optical viewing path adjacent to the sample. The self-clearing objective includes an optical element (106, 210, 310, 408, 510) and a substantially transparent fluid (104, 213, 326, 512) flowing between the optical element and the sample such that at least a portion adjacent to the sample is substantially cleared of debris. The optical element and the fluid cooperatively direct the beam towards the sample. This self-clearing objective may be coupled with various measurement devices to measure various characteristics of samples having debris that prevents clear optical measurements. Additionally, the measurement device may be integrated with or coupled to various sample processing systems so that the relevant process may be clearly monitored.</p>
申请公布号 WO0120304(A2) 申请公布日期 2001.03.22
申请号 WO2000US24888 申请日期 2000.09.11
申请人 KLA-TENCOR CORPORATION 发明人 NIKOONAHAD, MEHRDAD;LEE, SHING;KELE, KALMAN;ZHAO, GUOHENG;LEHMAN, KURT, R.
分类号 B24B37/005;B24B49/12;B24D7/12;G01B11/00;G01B11/06;G01N1/32;G01N1/34;G01N21/00;G01N21/15;G01N21/21;G01N21/45;G01N21/47;H01L21/304;(IPC1-7):G01N21/00 主分类号 B24B37/005
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