| 摘要 |
PROBLEM TO BE SOLVED: To form a thin (Ba, Sr)TiO3 dielectric film having a high dielectric constant and high insulating property and useful as a capacitor material for various uses in an electronic device. SOLUTION: This compsn. contains a principal compsn. in which the molar ratio of Ba:Sr:Ti is (1-x):x:y (0<=x<=1.0 and 0.9<=y<=1.1) and 0.5-10mol% (expressed in terms of Si) Si component based on the amt. of the principal compsn. A substrate is coated with this compsn. by a spin coating method and drying and firing at 450-800 deg.C are carried out. Compsn. control is easily attained and the objective thin (Ba, Sr)TiO3 dielectric film having a high dielectric constant and high insulating property is formed by a low-cost sol-gel method. |
