| 摘要 |
PROBLEM TO BE SOLVED: To simplify a device and to increase accuracy by minimizing movable optical member. SOLUTION: A first optical axis of radiated light emitted from a light source 21 is provided with a micro lens array 25, a first pinhole array 26, and a polarization beam splitter 27. A second optical axis orthogonal to the first optical axis is provided with a plane mirror 30 for returning the radiated light from the light source 21 reflected on the polarization beam splitter 27 to the polarization beam splitter 27, and confocal lenses 32, 33 for radiating the radiated light transmitting through the polarization beam splitter 27 and returned by the mirror 30 to a measuring object surface 35 and injecting the reflected light from the measuring object surface to the polarization beam splitter 27. This device includes a second pinhole array 37 on the first optical axis, a light receiving apparatus 41 for receiving each reflected light having transmitted through each unit through-hole of this pinhole array 27, and a data processing 43 for calculating a three-dimensional shape on the measuring object surface based on each mirror position providing a maximum light strength when the position of the plane mirror 30 is varied.
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