| 摘要 |
PURPOSE: An oxidizing apparatus is provided to reduce an ozone exhausted from a lamp house to a heat exhaust system. CONSTITUTION: This apparatus comprises a treatment container receiving a body to be treated, treated gas-supplying means (a gas-supplying pipe) for supplying the treatment gas containing ozone to the treatment container, and a lamp house(20) provided on the treatment container via a ultraviolet-ray transmitting window in which a ultraviolet-ray lamp is received, and the ozone in the treatment container is irradiated with the ultraviolet-rays from the ultraviolet-ray lamp to be decomposed so as to oxidize the body to be treated. An inlet port(22) and an exhaust port(23) for circulating cooling air are provided on the lamp house(20), and ozone decomposing means is provided in a thermal exhaust system(50) connected to the exhaust port(23).
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