发明名称 INDEX TYPE EDGE POLISHER
摘要 PROBLEM TO BE SOLVED: To provide an index type edge polisher formed such that the edge parts of both surfaces of the outer periphery of a circular workare continuously polished by a single polishing drum without reversing the surface and the back of the work and suspending a polishing work. SOLUTION: This edge polisher is formed such that four work holding means 3 are disposed at intervals of 90 deg. on an index table 1 intermittently rotated in a 90 deg. arc at a time around a first axis L1 and a polishing drum 4 inclining based on the first axis L1 is disposed at the central part of the index table 1, and the index table 1 is intermittently rotated in a 90 deg. are at a time. This constitution polishes the edge of the outer periphery of the work W by moving each work holding means 3 from a handling position to feed and take out the work W, in order, to a first machining position H1 where an outer periphery edge E1 on the surface side is polished by the polishing drum 4, a second machining position where a peripheral side is polished, and a third machining position H3 where an outer pery edge on the back side is polished.
申请公布号 JP2001062686(A) 申请公布日期 2001.03.13
申请号 JP19990238631 申请日期 1999.08.25
申请人 SPEEDFAM CO LTD 发明人 HAKOMORI SHUNJI;ASANO TSUKASA;MIZUNO NORIAKI
分类号 B24B9/00;H01L21/304;(IPC1-7):B24B9/00 主分类号 B24B9/00
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