CHEMICALLY INERT MEGASONIC TRANSDUCER SYSTEM

摘要

A megasonic cleaning system comprised of a container, a resonator, a piezoelectric crystal (130) and an indium layer (138) for attaching the resonator to the piezoelectric crystal. The container includes a fluid chamber for holding a volume of cleaning solution. The resonator is selected from the group consisting of sapphire, quartz, silicon carbide, silicon nitride and ceramic. The resonator forms the bottom of the container and has an interface surface which abuts the fluid chamber.