FILM FORMING METHOD AND FILM FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To form a BST film having higher quality. SOLUTION: In a shower chamber 106, source gas and a trace amt. of oxidizing gas are mixed, and premix gas obtd. by mixing the source gas and oxidizing gas is fed to the surface of a substrate 103 from a premix gas discharging port 108. Then, by discharging a large quantity of oxidizing gas from an another oxidizing gas discharging port 109, this large quantity of oxidizing gas and the premix gas discharged to the surface of the substrate 103 are mixed on the substrate 103.