发明名称 DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To ease maintenance after emergency stop by controlling an electric drive system before an electric power is interrupted by a power source breaker when an emergency stop switch is turned on and damping an electric power supplied from a main power source. SOLUTION: When an emergency stop EMO is operated, a contact 21 to hold the EMO state by a relay 8 becomes open, and even when a contact 3 of the emergency stop switch becomes closed by an elastic material such as a spring, etc., fitted to an EMO switch 1, no electric power is supplied to an electromagnetic relay 9 for power source on/off contact 10 for cutting off electric power, and a relay 8 for holding the EMO state during operation of EMO. The contact 21 for controlling the relay 8 is still open, and the EMO state is held until a reset switch 7 in the EMO state becomes closed. To reset this state, the reset switch 7 is closed.</p>
申请公布号 JP2001060614(A) 申请公布日期 2001.03.06
申请号 JP20000171798 申请日期 2000.06.08
申请人 CANON INC 发明人 NAKAMURA HAJIME
分类号 G03F7/20;H01L21/027;H01L21/68;(IPC1-7):H01L21/68 主分类号 G03F7/20
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