发明名称 |
Process for coating a solution onto a substrate |
摘要 |
<p>The invention relates to an apparatus and a method of using the apparatus for applying a substantially uniform coating of solution onto a substrate. The apparatus includes a substrate support having a compressible surface. <IMAGE></p> |
申请公布号 |
EP1080791(A2) |
申请公布日期 |
2001.03.07 |
申请号 |
EP20000307487 |
申请日期 |
2000.08.31 |
申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
PRINCIPE, FRANK SANTO;INNOCENZO, JEFFREY GLENN |
分类号 |
G03F7/16;B05C1/02;B05C11/02;B05D3/00;G03F3/10;(IPC1-7):B05C11/02 |
主分类号 |
G03F7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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