发明名称 METHOD FOR TREATING SUBSTRATES FOR MICROELECTRONICS AND SUBSTRATES OBTAINED ACCORDING TO SAID METHOD
摘要 <p>The invention relates to a method for treating substrates (50) for microelectronics or optoelectronics, whereby said substrates comprise a useful layer (52) on at least one of the surfaces thereof. The inventive method includes a mechanical/chemical polishing step occurring on a bare surface (54) of the useful layer and is characterized in that it also comprises a post-curing step in a reductive atmosphere (100) before said polishing step occurs.</p>
申请公布号 WO2001015215(A1) 申请公布日期 2001.03.01
申请号 FR2000002330 申请日期 2000.08.17
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址