| 摘要 |
<p>An aberration measuring apparatus has a converging lens L for converging light beams traveling through a measurement target optical system PL on a predetermined surface IP, an aperture stop AP for transmitting a part of the light beams, a converging position detection unit DET for detecting a positional deviation of a converging position P of a part of the light beams traveling through the aperture stop on the predetermined surface IP, a moving unit M for moving the aperture stop in a direction intersecting an optical axis, and an arithmetic processing unit for calculating an aberration of the measurement target optical system PL on the basis of an output signal from the converging position detection unit DET. <IMAGE></p> |
