发明名称 SCRUBBER WITH PRE WET DEVICE
摘要 The present invention relates to a scrubber including an advance water treatment device. The scrubber comprises: an advance water treatment tank which includes the lower side having an opened lower side located inside a main water treatment tank and the upper side protruding from the upper side of the main water treatment tank upwards; a moving pipe which includes a rear end unit connected to an injection unit connected to a process chamber and a leading end unit passing through the upper side of the advance water treatment tank; a connection pipe which includes a lower end passing through the upper side of the advance water treatment tank and extended and installed as a predetermined length and an upper end connected to a burner of a reactor by being protruding from the upper side of the advance water treatment tank upwards; a water spray nozzle to spray water from the inner side since a leading end unit passes through the upper side of the advance water treatment tank; and a nitrogen spray nozzle to spray nitrogen from the inner side since a leading end unit passes through the upper side of the advance water treatment tank. The present invention as above has an effect capable of preventing the pressure of the connection pipe from being changed or preventing a flame of the burner from being out by powder since the powder produced in process gas is not formed inside the connection pipe or the burner and is removed by the advance water treatment device.
申请公布号 KR20160073006(A) 申请公布日期 2016.06.24
申请号 KR20140181177 申请日期 2014.12.16
申请人 GLOBAL STANDARD TECHNOLOGY CO., LTD. 发明人 JANG, SUN GI;PARK, JONG MIN;PARK, JIN MAN;PARK, SANG JOON;CHAE, MYUNG KI;KIN, JONG YUN;LEE, GUNE HWAN;MO, SUN HEE;KIM, KYEONG MIN
分类号 H01L21/02 主分类号 H01L21/02
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