发明名称 |
Spin-processing apparatus and spin-processing method |
摘要 |
The present invention provides a spin-processing apparatus less likely to produce a mist when an object to be processed is rotated. The apparatus is characterized in that it comprises a cup body having a lower cup and an upper cup mounted relative to the lower cup to be up/down movable, a rotation body retaining the object mounted within the cup body, a step motor rotationally driving the rotation body, an exhaust tube connected to a bottom of the lower cup to allow a gas in the cup body to be exhausted, and a scatter-proof cover provided within the upper cup and mounted above the rotation body.
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申请公布号 |
US6192903(B1) |
申请公布日期 |
2001.02.27 |
申请号 |
US19990297612 |
申请日期 |
1999.05.03 |
申请人 |
SHIBAURA MECHATRONICS CORPORATION;KABUSHIKI KAISHA TOSHIBA |
发明人 |
DOI TSUTOMU;KUROKAWA YOSHIAKI;SAKURAI NAOAKI |
分类号 |
B08B3/02;F26B5/08;H01L21/00;(IPC1-7):B08B7/00 |
主分类号 |
B08B3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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