| 摘要 |
PROBLEM TO BE SOLVED: To maintain a stable glow discharge for a stable laser beam output as well as working performance of high quality. SOLUTION: Electrodes 3 and 4 are provided at a part of a discharge tube 2 constituting the flow path of laser gas 12. An optical resonator 15 which emits laser beam 10 by discharging/exciting the laser gas 12 on a high-voltage power source 5, a piping path 11 which constitutes a circular path for the laser gas 12 together with the discharge tube 2, and a blower 1 for circulating the laser gas 12 in the discharge tube 2, are provided. A detector 13 is provided in the piping path 11 which measures the oil content remaining in the laser gas 12. The laser gas 12 passes a filter 14 for removing oil content when the oil content measured with the detector 13 is at a constant value or above. Thus, the water content in the laser gas 12 is suppressed to keep a glow discharge for stable laser beam output as well as high-quality working performance.
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