发明名称 Optical waveguide fabrication method
摘要 A method for fabricating an optical waveguide, comprising the following steps. That is, forming an optical waveguide on surface of a substrate via an atmospheric pressure chemical vapor deposition (AP-CVD) method using a silica raw material containing an organic material, and irradiating ultraviolet light on at least a portion of that optical waveguide. The refractive index of the portion of the optical waveguide irradiated with ultraviolet light increases. Since changing the refractive index in this way enables the formation of a diffraction grating, it is possible to manufacture optical filters and wavelength dispersion devices.
申请公布号 US6192712(B1) 申请公布日期 2001.02.27
申请号 US19980035076 申请日期 1998.03.05
申请人 NEC CORPORATION 发明人 SAITO TAKASHI;HANADA TADAHIKO
分类号 C03B19/14;G02B6/12;G02B6/13;G02B6/132;(IPC1-7):C03B37/022 主分类号 C03B19/14
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