| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device having a particle source unlikely to be influenced by a mechanical and an electromagnetic disturbance. SOLUTION: A charged particle beam device includes a particle source to release a charged particle beam having an emitter accommodated in an emitter chamber 19 and is equipped with a column 3 surrounded by a jacket and having a particle-optical element accelerating and converging the beam, wherein the emitter is supported so as not to be influenced by vibrations by coupling the emitter chamber 19 to the column 3, through a ring-shaped electrode system. Because a power supplying unit 47 is installed near the emitter, no high voltage lead is required, and it is possible to avoid the reach of any disturbance signal to the emitter via a current feed lead. The device can be prevented from internal generation of undesirable potential difference by conducting the control with optical signals through an optical fiber. |
