| 摘要 |
<p>PROBLEM TO BE SOLVED: To treat disposed gases from a small number of units by providing a condenser for indirectly heat transferring from a PFC-containing gas flow and a substance moving unit for sorting a PFC-containing condensate into a highly volatile PFC flow and a PFC product. SOLUTION: A flow 10 made of a nitrogen carrier gas is treated to remove a non-PFC gas. The flow 10 is cooled in a heat exchanger 12, and introduced as a flow 14 into a condenser 18. A flow 40 is introduced into the flow 14 at an inlet to a condenser 18 to resultantly increase a concentration of a CF 4 in a generated flow 16 and to lower its temperature. The flow 16 is cooled in the condenser 18 so as to form a carrier gas existing as a flow 22 and a flow 20 by condensing the PFC. The flow 2 is poured in a fractionating tower 38, and separated to form a flow 40 and a flow 42. Thus, even if one system is faulted, its influence can be limited to only a part of a manufacturing apparatus.</p> |
