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发明名称
METAL ION REDUCTION IN PHOTORESIST COMPOSITIONS BY CHELATING ION EXCHANGE RESIN
摘要
申请公布号
EP0863925(B1)
申请公布日期
2001.02.21
申请号
EP19960940856
申请日期
1996.11.21
申请人
CLARIANT FINANCE (BVI) LIMITED
发明人
RAHMAN, M., DALIL;AUBIN, DANIEL, P.
分类号
G03F7/004;C08G8/00;C08L61/06;G03F7/023;G03F7/32;G03F7/38;(IPC1-7):C08G8/00;G03F7/032
主分类号
G03F7/004
代理机构
代理人
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地址
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