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发明名称
摘要
申请公布号	JP3136335(B2)	申请公布日期	2001.02.19
申请号	JP19970265103	申请日期	1997.09.12
申请人		发明人
分类号	C23C16/20;(IPC1-7):C23C16/20	主分类号	C23C16/20
代理机构		代理人
主权项
地址

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