| 摘要 |
PROBLEM TO BE SOLVED: To reduce the range of a class 1 clean environment and to shorten the carrying time of an automatic traveling carrier for reducing the production cost, and the manufacturing period. SOLUTION: A stocker carrying system is provided with cassettes 800 for housing wafers, a stocker 100, which can house these cassettes 800 and is provided with a plurality of shelves 700 in its interior, and robots 200 for carrying the above products between treating stations EQ and the stocker 100. The stocker 100 is provided with cranes 400, provided in its interior, cassette loading/ unloading carrier ports 600 and a plurality of input/output ports 500. The cassette 800 are carried between the stocker 100 and the outside via the ports 600. These products housed in the cassettes 800 are carried between the stocker 100 and the stations EQ via the ports 500. |
