| 摘要 |
PURPOSE: A magnetic oscillator and magnetic tuning circuit of a micro gyroscope is provided to simplify a magnetic oscillator circuit part for driving oscillation of a natural frequency of the micro gyroscope in an oscillation mode and automatically make resonant frequencies of the oscillation mode and a sensing mode equal always, thereby reducing manufacturing cost and optimizing the sensing performance regardless of the environmental change. CONSTITUTION: A magnetic oscillator and magnetic tuning circuit of a micro gyroscope includes a magnetic oscillator circuit part(130) for driving oscillation and a detecting circuit part(140) for sensing, wherein the magnetic oscillator circuit part for driving oscillation is formed with a feedback loop for shifting a phase of a voltage corresponding to a capacitance from an electrode for oscillation detection of the micro gyroscope(10) by 360°toward an electrode fixing part for driving oscillation of the micro gyroscope by a phase shifter(133), and the detecting circuit part for sensing detects DC components of a voltage to supply a bias voltage proportional to the DC components to C/V amplifiers(41,42). |
