CERAMIC HEATER

摘要

The invention provides a ceramic heater having high thermal conductivity, which allows the surface temperature of a heater plate to immediately follow the changes in temperature of a heater, controls the temperature of the heating surface, and prevents thermal diffusion of impurity (for example, Y) from the ceramic heater to a semiconductor wafer. The ceramic heater includes a heater element embedded in the surface of a ceramic substrate, and a heating surface having a JIS B 0601 surface roughness of Rmax=0.05-200 sg(m)m.