| 摘要 |
PROBLEM TO BE SOLVED: To obtain a substrate transferring device which can simultaneously improve the reliability and speed of substrate transfer. SOLUTION: A substrate transferring device is provided with a plurality of conveyor type transporting mechanisms 31 which can transport a substrate B in turn, transfer pawls 81 which can transfer the substrate B in a pushing state between adjacent transporting mechanisms 31, and a pawl moving mechanism 82 which moves the pawls 81 along the transporting mechanisms 31. The device is also provided with a control means 80 which moves the pawls 81 with respect to the substrate B transported by means of the transporting mechanisms 31 in a following state by controlling the transporting mechanisms 31 and pawl moving mechanism 82.
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