| 摘要 |
PROBLEM TO BE SOLVED: To obtain a spacer spraying device capable of uniformly spraying spacers on a substrate of any size, improving the maintainability and shortening the tact time. SOLUTION: This device is provided with a substrate holding means 2 to hold a substrate 1 on which spacers are to be sprayed, a dispersion liquid supply means 11 to supply a volatile dispersion liquid prepared by dispersing the spacers, a nozzle 10 to spray the volatile dispersion liquid 12 in a mist state, an X-axis movement mechanism 20 and Y-axis movement mechanism 21 to move and scan the nozzle 10 in the two axial directions perpendicular to each other, a control means 22 to control the X-axis movement mechanism 20 and the Y-axis movement mechanism 21, and a spraying booth 3 to house these means. The device is further provided with a charge imparting means 15 to electrostatically electrify the volatile dispersion liquid supplied from the dispersion liquid supply means.
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