| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sample conveying device which can convey samples held under a high vacuum to a surface analyzing device, etc., without exposing them to air. SOLUTION: This sample conveying device is equipped with a chamber 2 which can be evacuated to a high vacuum, a sample case 4 which store sample holders 5 where samples are installed in the chamber, a manipulator 6 for sample storage which translates the sample case upward and downward, a sample exchange manipulator 8 which horizontally translates the sample holders 5 put in the sample case, and a docking chamber 12 which is fitted to the chamber through a gate valve and can be evacuated; and the docking chamber can be evacuated to a high vacuum by a turbo molecular pump 19 through a gate valve 17. The samples are moved while held under the high vacuum, and then coupled with the analyzing device having another vacuum chamber through the docking chamber, so that they are conveyed under the same conditions.</p> |
