摘要 |
PROBLEM TO BE SOLVED: To manufacture a microgrid stable to heating in oxidative atmosphere with an easy method by including silicon dioxide as main component. SOLUTION: This microgrid is preferably formed of a mesh-like structure containing silicon dioxide as main component. Silicon alkoxide is hydrolyzed in the presence of a surfactant, and a film formed on the gas-liquid interface is dried. Otherwise, the film formed in the gas-liquid interface is scooped up with an electron microscopic sample mesh and dried. A thin film 21 formed on the surface of a reaction solution 22 is transferred to a substrate 23 of glass or mica and then peeled again on pure water 24 to wash components such as HCl adhered to the thin film 21. The thin film 21 after washing is finally transferred onto an electron microscopic sample mesh 25. This is naturally dried for one day in the atmosphere, whereby the microgrid is formed. Its mesh- like structure is stable to heating under oxidative atmosphere, and the structure can be kept, for example, even in the heating of 300 deg.C in the air.
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