| 摘要 |
PROBLEM TO BE SOLVED: To realize a driver for high-rigidity, high-precision feeding. SOLUTION: By arranging, on both forward and reverse sides of the moving direction of a rigid body 4, elastic body elements and piezoelectric elements 1 which stretch and shrink along the moving direction of a substance 3 to be conveyed, so that at least one may be a piezoelectric element 1, and by arranging piezoelectric elements 1 which stretch and shrink in a direction perpendicular to the moving direction of the substance 3, on the opposed-to-the- substance-3 side of the rigid body 4, high-rigidity accurate feeding is realized. |
