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发明名称
Gasphasenabscheidungsverfahren in einer einzigen Kammer für Dünnfilmtransistoren
摘要
申请公布号
DE69424759(T2)
申请公布日期
2001.02.08
申请号
DE1994624759T
申请日期
1994.11.22
申请人
APPLIED MATERIALS, INC.
发明人
LAW, KAM;ROBERTSON, ROBERT;FENG, GUOFU JEFF
分类号
C23C16/44;H01L21/205;H01L21/336;H01L29/786;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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