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发明名称
GERAET ZUR STEUERUNG DER IMPEDANZANPASSUNGSSCHALTUNG FUER EINE VAKUUM-PLASMABEARBEITUNGSVORRICHTUNG UND DAFUER GEEIGNETER DATENSPEICHER
摘要
申请公布号
DE69610510(T2)
申请公布日期
2001.02.01
申请号
DE19966010510T
申请日期
1996.12.27
申请人
LAM RESEARCH CORP., FREMONT
发明人
BARNES, S.;HOLLAND, PATRICK
分类号
H05H1/46;H01J37/32;H03H7/40;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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