Chemically amplified positive resist composition,申请号GB20000031072-传众专利搜索

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发明名称	Chemically amplified positive resist composition
摘要
申请公布号	GB0031072(D0)	申请公布日期	2001.01.31
申请号	GB20000031072	申请日期	2000.12.20
申请人	SUMITOMO CHEMICAL COMPANY LIMITED	发明人
分类号	H01L21/027;G03F7/004;G03F7/039	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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