| 摘要 |
An actuator utilizing the pressure of a gas is used to operate a diaphragm-operated control valve. An operating force generated by the actuator is varied by feeding and discharging a gas such as N2 through a narrow metallic tube. This is conducted by remote control, by means of electromagnetic valves provided in an environment at room temperature. The state of the control valve is monitored by a flow rate sensor which detects an actual flow rate of a fluid being controlled. Based on a signal representative of the detected actual flow rate, the electromagnetic valves for the actuator are controlled so that the fluid always flows at a desired flow rate. The gas such as N2 is heated by a heat exchanger in a high-temperature atmosphere in the vicinity of the actuator, to thereby prevent cooling of the fluid being controlled.
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