| 摘要 |
PROBLEM TO BE SOLVED: To keep high cleanliness in a system by removing various germs and foreign matters without lowering energy efficiency of a low temperature gas generator. SOLUTION: The low temperature gas generator comprises a compressor 11 for compressing refrigerant gas, a booster 13 for boosting compressed refrigerant gas introduced from the passage led out from the compressor 11, an expansion turbine 16 for lowering the temperature of the boosted refrigerant gas introduced from the passage led out from the booster 13 through adiabatic expansion to produce low temperature refrigerant gas, and a cold heat consumption facility 20 for cooling an object using low temperature refrigerant gas wherein means 23 for cleaning the refrigerant gas by removing solid matters, e.g. various germs and foreign matters, from the refrigerant gas is provided in the passage led out from the booster 13.
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