Dual diaphragm, single chamber mesopump

摘要

A diaphragm pump, which is preferably electrostatically actuated, but which may be activated by other forces such as electromagnetic or piezoelectric actuation. The pump is formed by a pump body having a pump chamber formed therein. First and second diaphragms each having a set of valve holes in the diaphragm surface thereof are mounted in the chamber. Also provided are at least one inlet and at least one outlet port for communication with the pump chamber. The ports are positioned for sealing contact with the diaphragms at points that are not aligned with the holes in the diaphragms. A driver electrostatically actuates the diaphragms to cause diaphragm movement to a plurality of diaphragm positions to control flow of fluid through the pump. The first position is when the diaphragms are spaced from one another and from the ports to permit flow of fluid through the pump chamber. The second position is when the diaphragms are in diaphragm surface contact with the sets of holes mutually nonaligned to form a seal between the diaphragms. The third position is when a diaphragm is in diaphragm surface contact with the ports to form the sealing contact.