发明名称 |
Method for plasma deposition of a thin film onto a surface of a container |
摘要 |
A gas inlet, which also serves as a counter electrode, is located inside of a vacuum chamber made of an electrically insulating material. A container is mounted on a mandrel mounted on the gas inlet. The chamber is evacuated to a subatmospheric pressure. A process gas is then introduced into the container through the gas inlet. The process gas is ionized by coupling RF power to a main electrode located adjacent an exterior surface of the chamber and to the gas inlet which deposits a plasma enhanced chemical vapor deposition (PECVD) thin film onto the interior surface of the container.
|
申请公布号 |
US6180191(B1) |
申请公布日期 |
2001.01.30 |
申请号 |
US19980187531 |
申请日期 |
1998.11.05 |
申请人 |
NANO SCALE SURFACE SYSTEMS, INC. |
发明人 |
FELTS JOHN T. |
分类号 |
C23C16/04;C23C16/40;H01J37/32;(IPC1-7):H05H1/24 |
主分类号 |
C23C16/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|