| 摘要 |
PURPOSE: To enhance resolution by incorporating an alkali-soluble resin, a crosslinking agent, a specified N-substituted succinimide compound and an acid generating agent other than the succinimide compound. CONSTITUTION: The chemical amplification negative type resist composition contains an alkali-soluble resin, a crosslinking agent, an N-substituted succinimide compound of the formula and an acid generating agent other than the succinimide compound. In the formula, R is optionally substituted alkyl, the residue of an alicyclic hydrocarbon, aryl or camphor. It is supposed that the N-substituted succinimide compound promotes the solubility of the unexposed part of the resist composition, increases contrast and enhances resolution because the compound is hydrolyzed with an alkali developing solution by a prescribed scheme and changes from the water-insoluble state to a water-soluble state.
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