发明名称 Production of ceramic layers, especially carbide layers, on a substrate comprises feeding ceramic particles to the substrate using a transfer medium enriched with ceramic particles by heating a ceramic part to a high temperature
摘要 Production of ceramic layers, especially carbide layers, on a substrate (8), especially silicon, comprises feeding ceramic particles to the substrate using a transfer medium, especially a melt (3). The transfer medium is enriched with ceramic particles by heating a ceramic part, which is held in areas outside of the transfer medium, to a high temperature, and moving the ceramic part and the transfer medium in relation to one another during the method. An Independent claim is also included for a device for producing ceramic layers, especially silicon, on a substrate comprising a holder (15) for one part (9, 10) with ceramic material, and an arrangement for moving the ceramic part and the melt against one another.
申请公布号 DE10007946(A1) 申请公布日期 2001.09.13
申请号 DE2000107946 申请日期 2000.02.22
申请人 SCHARMANN, FRIEDHELM 发明人 SCHARMANN, FRIEDHELM
分类号 C23C2/04;C30B19/02;C30B19/08;H01L21/314 主分类号 C23C2/04
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