| 摘要 |
PROBLEM TO BE SOLVED: To easily take out a workpiece by rotating a head in a direction of revolution and each base board in a direction of autorotation in accordance with a position of revolution direction and autorotation direction of each carrier at the time ending polishing of the workpiece. SOLUTION: When polishing by a work part 1 is ended, a position of revolution direction and autorotation direction of a hole 8 for holding each workpiece of each carrier 7 is detected, an unloading side head 23 of a transfer feed part 18 is rotated in accordance with a position of autorotation direction of the hole 8 for holding each workpiece of each carrier 7, each base board 24 of the unloading side head 23 is rotated in accordance with a position of autorotation, and each chuck of each base board 24 of the unloading side head 23 and the hole 8 for holding each workpiece of each carrier are positioned on the same straight line. Next each workpiece 10 in the hole 8 for holding each workpiece of each carrier 7 is firmly held by a chuck, and the workpiece 10 is loaded on an unloading table 16. |
