| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer housing chamber with which a manufacturing period can be shortened, production efficiency can be improved and a production cost can be reduced. SOLUTION: This wafer housing chamber for housing and carrying wafers is constituted by a chamber 12 for housing wafers and a lid 14 adhesively fixed on the chamber 12 to seal the chamber 12. There is provided means for temporarily holding a gas for sealing the chamber 12 inside the lid 14 and introducing the sealing gas into the chamber 12. There is also provided means for temporarily achieving a low pressure space inside the lid 14 and sucking a gas in the chamber 12 into the low pressure space for exhaustion.</p> |
