MICRO-MACHINED MIRROR DEVICE

摘要

A micro machined mirror assembly is provided that includes a micro machined top cap (205), mirror (210), and bottom cap (215) mounted onto a ceramic substrate. The micro machined mirror is resiliently supported by a pair of T-shaped hinges and includes travel stops that limit motion of the mirror in the x-, y-, and z-directions. The top and bottom micro machined caps also include travel stops that limit motion of the mirror in the z-direction.