Method of manufacturing capacitive ceramic absolute pressure sensors classified in zero-point long-term stability groups

摘要

The method involves forming an annular metal film electrode near the edge of one surface of a disc-shaped base body and a circular metal film second electrode in the centre insulated w.r.t. the first electrode. A membrane on one surface carries a third electrode. The electrodes have external connections. The base body and membrane are joined by solder at their outer edges to form an evacuated chamber. A reference capacitance is formed between the first and third electrodes. A capacitance dependent on the external pressure is formed between the second and third electrodes. A high accuracy capacitance null-point measurement device is used to derive error classes using a given technique.