SUBSTRATE HOLDER FOR FILM FORMATION AND METHOD FOR FORMING FILM USING THE HOLDER

摘要

PROBLEM TO BE SOLVED: To provide a substrate holder or the like for film formation free from the need of exchanging a pallet (with the one) for carrying matching to the size of a substrate, moreover reduced in charging time and capable of reducing the production cost. SOLUTION: This is a substrate holder 1 for film formation having an outer shape form being mountable to substrate fitting holes (e.g. of 3.5 inches) in a pallet for carrying in an inline type sputtering device and a supporting hole 3 for handling. The substrate holder 1 for film formation has substrate fitting holes 2 capable of being mounted with a plurality of substrates (e.g. of 1 inch) for film formation.