摘要 |
<p>PROBLEM TO BE SOLVED: To effectively form a surface modified layer impregnated with ions to an insulating material. SOLUTION: At the time of subjecting the object 2 to be treated as an insulating material to surface treatment, at first, a metallic thin film 50 having electric conductivity is formed on the surface. Next, by applying pulselike voltage contg. positive pulse voltage and negative pulse voltage to the object 2 to be treated in plasma contg. ions to be impregnated, the surface of the object 2 to be treated is impregnated with the ions. In this way, the surface shape of the object 2 to be treated is vertically impregnated with the ions, and a surface modified layer 51 is formed. Moreover, by applying the pulselike voltage to the object 2 to be treated, the charge up of the object 2 to be treated can be prevented.</p> |